Exploration of GHz-scanning acoustic microscopy for failure analysis of innovative silicon technologies
dc.contributor.author | Khaled, Ahmad | |
dc.date.accessioned | 2021-10-27T11:19:04Z | |
dc.date.available | 2021-10-27T11:19:04Z | |
dc.date.issued | 2019-12 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/33274 | |
dc.source | IIOimport | |
dc.title | Exploration of GHz-scanning acoustic microscopy for failure analysis of innovative silicon technologies | |
dc.type | PHD thesis | |
dc.contributor.imecauthor | Khaled, Ahmad | |
dc.contributor.orcidimec | Khaled, Ahmad::0000-0003-2892-3176 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.contributor.thesisadvisor | De Wolf, Ingrid | |
dc.contributor.thesisadvisor | Wevers, Martine | |
imec.availability | Published - open access |