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Vapor-deposited zeolitic imidazolate frameworks as gap-filling ultra-low-k dielectrics

dc.contributor.authorKrishtab, Mikhail
dc.contributor.authorStassen, Ivo
dc.contributor.authorStassin, Timothee
dc.contributor.authorCruz, Alexander John
dc.contributor.authorOkudur, Oguzhan Orkut
dc.contributor.authorArmini, Silvia
dc.contributor.authorWilson, Chris
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorAmeloot, Rob
dc.date.accessioned2021-10-27T11:48:20Z
dc.date.available2021-10-27T11:48:20Z
dc.date.issued2019
dc.identifier.issn2041-1723
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33335
dc.sourceIIOimport
dc.titleVapor-deposited zeolitic imidazolate frameworks as gap-filling ultra-low-k dielectrics
dc.typeJournal article
dc.contributor.imecauthorKrishtab, Mikhail
dc.contributor.imecauthorStassen, Ivo
dc.contributor.imecauthorStassin, Timothee
dc.contributor.imecauthorCruz, Alexander John
dc.contributor.imecauthorOkudur, Oguzhan Orkut
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecOkudur, Oguzhan Orkut::0000-0002-4790-7772
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage3729
dc.source.journalNature Communications
dc.source.volume10
dc.identifier.urlhttps://doi.org/10.1038/s41467-019-11703-x
imec.availabilityPublished - open access


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