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Innovation in ion beam analysis for nanoelectronic materials

dc.contributor.authorLaricchiuta, Grazia
dc.date.accessioned2021-10-27T12:05:54Z
dc.date.available2021-10-27T12:05:54Z
dc.date.issued2019-11
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33372
dc.sourceIIOimport
dc.titleInnovation in ion beam analysis for nanoelectronic materials
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorVandervorst, Wilfried
dc.contributor.thesisadvisorMeersschaut, Johan
dc.identifier.urlhttps://limo.libis.be/primo-explore/fulldisplay?docid=LIRIAS2866348&context=L&vid=Lirias&search_scope=Lirias&tab=default_tab&lang=en_US
imec.availabilityPublished - open access


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