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Material-selective doping of 2D TMDC through AlxOy encapsulation

dc.contributor.authorLeonhardt, Alessandra
dc.contributor.authorChiappe, Daniele
dc.contributor.authorAfanas'ev, Valeri V.
dc.contributor.authorEl Kazzi, Salim
dc.contributor.authorShlyakhov, Ilya
dc.contributor.authorConard, Thierry
dc.contributor.authorFranquet, Alexis
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-27T12:20:54Z
dc.date.available2021-10-27T12:20:54Z
dc.date.issued2019
dc.identifier.issn1944-8244
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33403
dc.sourceIIOimport
dc.titleMaterial-selective doping of 2D TMDC through AlxOy encapsulation
dc.typeJournal article
dc.contributor.imecauthorLeonhardt, Alessandra
dc.contributor.imecauthorShlyakhov, Ilya
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.identifier.doi10.1021/acsami.9b11550
dc.source.peerreviewyes
dc.source.beginpage42697
dc.source.endpage42707
dc.source.journalACS Applied Materials & Interfaces
dc.source.issue45
dc.source.volume11
dc.identifier.urlhttps://doi.org/10.1021/acsami.9b11550
imec.availabilityPublished - imec


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