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Determining the ultimate resolution of scanning electron microscope unbiased roughness measurements, part 1: Simulating noise

dc.contributor.authorMack, Chris
dc.contributor.authorLorusso, Gian
dc.date.accessioned2021-10-27T13:05:20Z
dc.date.available2021-10-27T13:05:20Z
dc.date.issued2019
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33489
dc.sourceIIOimport
dc.titleDetermining the ultimate resolution of scanning electron microscope unbiased roughness measurements, part 1: Simulating noise
dc.typeJournal article
dc.contributor.imecauthorLorusso, Gian
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage62903
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue6
dc.source.volume37
dc.identifier.urlhttps://doi.org/10.1116/1.5122758
imec.availabilityPublished - open access


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