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Atomic scale observation of atom distributions in 3D devices using atom probe tomography

dc.contributor.authorMelkonyan, Davit
dc.date.accessioned2021-10-27T13:49:39Z
dc.date.available2021-10-27T13:49:39Z
dc.date.issued2019-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33570
dc.sourceIIOimport
dc.titleAtomic scale observation of atom distributions in 3D devices using atom probe tomography
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorVandervorst, Wilfried
dc.identifier.urlhttps://limo.libis.be/primo-explore/fulldisplay?docid=LIRIAS2850181&context=L&vid=Lirias&search_scope=Lirias&tab=default_tab&lang=en_US
imec.availabilityPublished - open access


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