Show simple item record

Epitaxial growth and strain relaxation studies of BaTiO3 and BaTiO3/SrTiO3 superlattices grown by MBE on SrTiO3-buffered Si(001) substrate

dc.contributor.authorMerckling, Clement
dc.contributor.authorKorytov, Maxim
dc.contributor.authorCelano, Umberto
dc.contributor.authorHsu, Mark
dc.contributor.authorNeumayer, Sabine M.
dc.contributor.authorJesse, Stephen
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-27T13:51:57Z
dc.date.available2021-10-27T13:51:57Z
dc.date.issued2019
dc.identifier.issn0734-2101
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33574
dc.sourceIIOimport
dc.titleEpitaxial growth and strain relaxation studies of BaTiO3 and BaTiO3/SrTiO3 superlattices grown by MBE on SrTiO3-buffered Si(001) substrate
dc.typeJournal article
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorKorytov, Maxim
dc.contributor.imecauthorCelano, Umberto
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecCelano, Umberto::0000-0002-2856-3847
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewyes
dc.source.beginpage21510
dc.source.journalJournal of Vacuum Science and Technology A
dc.source.issue2
dc.source.volume37
dc.identifier.urlhttps://doi.org/10.1116/1.5082237
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record