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Atom probe of GaN/AlGaN heterostructures: the role of electric field, sample crystallography and laser excitation on quantification

dc.contributor.authorMorris, Richard
dc.contributor.authorCuduvally, Ramya
dc.contributor.authorMelkonyan, Davit
dc.contributor.authorZhao, Ming
dc.contributor.authorvan der Heide, Paul
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-27T14:21:46Z
dc.date.available2021-10-27T14:21:46Z
dc.date.issued2019
dc.identifier.issn0304-3991
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33626
dc.sourceIIOimport
dc.titleAtom probe of GaN/AlGaN heterostructures: the role of electric field, sample crystallography and laser excitation on quantification
dc.typeJournal article
dc.contributor.imecauthorMorris, Richard
dc.contributor.imecauthorCuduvally, Ramya
dc.contributor.imecauthorZhao, Ming
dc.contributor.imecauthorvan der Heide, Paul
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecMorris, Richard::0000-0002-0902-7088
dc.contributor.orcidimecZhao, Ming::0000-0002-0856-851X
dc.contributor.orcidimecvan der Heide, Paul::0000-0001-6292-0329
dc.source.peerreviewyes
dc.source.beginpage112813
dc.source.journalUltramicroscopy
dc.source.volume206
dc.identifier.urlhttps://doi.org/10.1016/j.ultramic.2019.112813
imec.availabilityPublished - imec


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