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Universal perpendicular orientation of block copolymer microdomains using a filtered plasma

dc.contributor.authorOh, Jinwoo
dc.contributor.authorSuh, Hyo Seon
dc.contributor.authorKo, Youngpyo
dc.contributor.authorNah, Yoonseo
dc.contributor.authorLee, Jong-Chan
dc.contributor.authorYeom, Bongjun
dc.contributor.authorChar, Kookheon
dc.contributor.authorRoss, Caroline A.
dc.contributor.authorSon, Jeong Gon
dc.date.accessioned2021-10-27T14:58:46Z
dc.date.available2021-10-27T14:58:46Z
dc.date.issued2019
dc.identifier.issn2041-1723
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33689
dc.sourceIIOimport
dc.titleUniversal perpendicular orientation of block copolymer microdomains using a filtered plasma
dc.typeJournal article
dc.contributor.imecauthorSuh, Hyo Seon
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage2912
dc.source.journalNature Communications
dc.source.volume10
dc.identifier.urlhttps://www.nature.com/articles/s41467-019-10907-5
imec.availabilityPublished - open access


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