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Two-dimensional carrier profiling of InP-based structures using scanning spreading resistance microscopy

dc.contributor.authorDe Wolf, Peter
dc.contributor.authorGeva, M.
dc.contributor.authorReynolds, C. L.
dc.contributor.authorHantschel, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorBylsma, R. B.
dc.date.accessioned2021-10-06T10:59:59Z
dc.date.available2021-10-06T10:59:59Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3390
dc.sourceIIOimport
dc.titleTwo-dimensional carrier profiling of InP-based structures using scanning spreading resistance microscopy
dc.typeJournal article
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewno
dc.source.beginpage1285
dc.source.endpage1288
dc.source.journalJ. Vacuum Science and Technology A
dc.source.issue4
dc.source.volume17
imec.availabilityPublished - imec


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