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Degradation and breakdown in thin oxide layers: mechanisms, models and reliability prediction

dc.contributor.authorDegraeve, Robin
dc.contributor.authorKaczer, Ben
dc.contributor.authorGroeseneken, Guido
dc.date.accessioned2021-10-06T11:00:47Z
dc.date.available2021-10-06T11:00:47Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3395
dc.sourceIIOimport
dc.titleDegradation and breakdown in thin oxide layers: mechanisms, models and reliability prediction
dc.typeJournal article
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.source.peerreviewno
dc.source.beginpage1445
dc.source.endpage1460
dc.source.journalMicroelectronics and Reliability
dc.source.issue10
dc.source.volume39
imec.availabilityPublished - imec


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