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Stress measurements using ultraviolet micro-Raman spectroscopy

dc.contributor.authorDombrowski, Kai
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorDietrich, B.
dc.date.accessioned2021-10-06T11:05:27Z
dc.date.available2021-10-06T11:05:27Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3425
dc.sourceIIOimport
dc.titleStress measurements using ultraviolet micro-Raman spectroscopy
dc.typeJournal article
dc.contributor.imecauthorDe Wolf, Ingrid
dc.source.peerreviewno
dc.source.beginpage2450
dc.source.endpage2451
dc.source.journalAppl. Phys. Lett.
dc.source.issue16
dc.source.volume75
imec.availabilityPublished - imec


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