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Silicide growth mechanisms on Si and SiGe substrates

dc.contributor.authorDonaton, Ricardo
dc.date.accessioned2021-10-06T11:06:08Z
dc.date.available2021-10-06T11:06:08Z
dc.date.issued1999-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3429
dc.sourceIIOimport
dc.titleSilicide growth mechanisms on Si and SiGe substrates
dc.typePHD thesis
dc.source.peerreviewno
imec.availabilityPublished - imec
imec.internalnotesThesis Advisors : Prof. Dr. A. Vantomme and Prof. Dr. Ir. K. Maex


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