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Heavily phosphorus doped germanium: strong relationship of phosphorus with vacancies and impact of Sn alloying on doping activation

dc.contributor.authorVohra, Anurag
dc.contributor.authorKhanam, Afrina
dc.contributor.authorSlotte, Jonatan
dc.contributor.authorMakkonen, Ilja
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorPorret, Clément
dc.contributor.authorLoo, Roger
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-27T22:58:46Z
dc.date.available2021-10-27T22:58:46Z
dc.date.issued2019
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34400
dc.sourceIIOimport
dc.titleHeavily phosphorus doped germanium: strong relationship of phosphorus with vacancies and impact of Sn alloying on doping activation
dc.typeJournal article
dc.contributor.imecauthorVohra, Anurag
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorPorret, Clément
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecVohra, Anurag::0000-0002-2831-0719
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecPorret, Clément::0000-0002-4561-348X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.embargo9999-12-31
dc.identifier.doi10.1063/1.5107503
dc.source.peerreviewyes
dc.source.beginpage225703
dc.source.journalJournal of Applied Physics
dc.source.issue22
dc.source.volume125
imec.availabilityPublished - imec


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