Nondestructive determination of pore size distribution in thin films deposited on solid substrates

dc.contributor.author	Dultsev, F. N.
dc.contributor.author	Baklanov, Mikhaïl
dc.date.accessioned	2021-10-06T11:07:57Z
dc.date.available	2021-10-06T11:07:57Z
dc.date.issued	1999
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/3440
dc.source	IIOimport
dc.title	Nondestructive determination of pore size distribution in thin films deposited on solid substrates
dc.type	Journal article
dc.date.embargo	9999-12-31
dc.source.peerreview	no
dc.source.beginpage	192
dc.source.endpage	194
dc.source.journal	Electrochemical and Solid State Letters
dc.source.issue	4
dc.source.volume	2
imec.availability	Published - open access