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Advanced metal semiconductor contacts for 14nm CMOS technology and beyond

dc.contributor.authorYu, Hao
dc.date.accessioned2021-10-28T00:13:41Z
dc.date.available2021-10-28T00:13:41Z
dc.date.issued2019-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34499
dc.sourceIIOimport
dc.titleAdvanced metal semiconductor contacts for 14nm CMOS technology and beyond
dc.typePHD thesis
dc.contributor.imecauthorYu, Hao
dc.contributor.orcidimecYu, Hao::0000-0002-1976-0259
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorDe Meyer, Kristin
dc.contributor.thesisadvisorCollaert, Nadine
imec.availabilityPublished - open access


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