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Mechanical integrity of nano-interconnects; the impact of metallization density

dc.contributor.authorZahedmanesh, Houman
dc.contributor.authorVanstreels, Kris
dc.date.accessioned2021-10-28T00:21:44Z
dc.date.available2021-10-28T00:21:44Z
dc.date.issued2019
dc.identifier.issn2590-0072
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34509
dc.sourceIIOimport
dc.titleMechanical integrity of nano-interconnects; the impact of metallization density
dc.typeJournal article
dc.contributor.imecauthorZahedmanesh, Houman
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.source.peerreviewyes
dc.source.beginpage35
dc.source.endpage40
dc.source.journalMicro and Nano Engineering
dc.source.volume2
dc.identifier.urlhttps://doi.org/10.1016/j.mne.2018.12.001
imec.availabilityPublished - imec


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