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Etching and passivation of group IV semiconductors: Ge and SiGe

dc.contributor.authorAbrenica, Graniel
dc.date.accessioned2021-10-28T20:08:57Z
dc.date.available2021-10-28T20:08:57Z
dc.date.issued2020-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34585
dc.sourceIIOimport
dc.titleEtching and passivation of group IV semiconductors: Ge and SiGe
dc.typePHD thesis
dc.contributor.imecauthorAbrenica, Graniel
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorDe Gendt, Stefan
dc.contributor.thesisadvisorvan Dorp, Dennis
imec.availabilityPublished - open access


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