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Potential sources of compositional inaccuracy in the atom probe tomography of InxGa1-xAs

dc.contributor.authorCuduvally, Ramya
dc.contributor.authorMorris, Richard
dc.contributor.authorFerrari, Piero
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorMelkonyan, Davit
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-28T20:53:29Z
dc.date.available2021-10-28T20:53:29Z
dc.date.issued2020
dc.identifier.issn0304-3991
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34944
dc.sourceIIOimport
dc.titlePotential sources of compositional inaccuracy in the atom probe tomography of InxGa1-xAs
dc.typeJournal article
dc.contributor.imecauthorCuduvally, Ramya
dc.contributor.imecauthorMorris, Richard
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecMorris, Richard::0000-0002-0902-7088
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.source.peerreviewyes
dc.source.beginpage112918
dc.source.journalUltramicroscopy
dc.source.volume210
dc.identifier.urlhttps://doi.org/10.1016/j.ultramic.2019.112918
imec.availabilityPublished - imec


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