Observation of oxide breakdown and its effects on the characteristics of ultra-thin-oxide nMOSFETs
dc.contributor.author | Henson, W. K. | |
dc.contributor.author | Yang, N. | |
dc.contributor.author | Wortman, J. J. | |
dc.date.accessioned | 2021-10-06T11:18:53Z | |
dc.date.available | 2021-10-06T11:18:53Z | |
dc.date.issued | 1999 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3500 | |
dc.source | IIOimport | |
dc.title | Observation of oxide breakdown and its effects on the characteristics of ultra-thin-oxide nMOSFETs | |
dc.type | Journal article | |
dc.source.peerreview | no | |
dc.source.beginpage | 605 | |
dc.source.endpage | 607 | |
dc.source.journal | IEEE Electron Device Letters | |
dc.source.issue | 12 | |
dc.source.volume | 20 | |
imec.availability | Published - imec |
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