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CMOS processes as basis for microsystem technology

dc.contributor.authorHermans, Lou
dc.contributor.authorBaert, Kris
dc.date.accessioned2021-10-06T11:20:00Z
dc.date.available2021-10-06T11:20:00Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3506
dc.sourceIIOimport
dc.titleCMOS processes as basis for microsystem technology
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpage184
dc.source.endpage189
dc.source.journalInformacije Midem - Journal of Microelectronics electronic components and materials
dc.source.issue4
dc.source.volume29
imec.availabilityPublished - imec


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