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Cost-effective cleaning and high-quality thin gate oxides

dc.contributor.authorHeyns, Marc
dc.contributor.authorBearda, Twan
dc.contributor.authorCornelissen, Ingrid
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorDegraeve, Robin
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorKenens, Conny
dc.contributor.authorKnotter, D. M.
dc.contributor.authorLoewenstein, Lee
dc.contributor.authorMertens, Paul
dc.contributor.authorMertens, S.
dc.contributor.authorMeuris, Marc
dc.contributor.authorNigam, Tanya
dc.contributor.authorSchaekers, Marc
dc.contributor.authorTeerlinck, Ivo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorVos, Rita
dc.contributor.authorWolke, K.
dc.date.accessioned2021-10-06T11:20:17Z
dc.date.available2021-10-06T11:20:17Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3507
dc.sourceIIOimport
dc.titleCost-effective cleaning and high-quality thin gate oxides
dc.typeJournal article
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorCornelissen, Ingrid
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorVos, Rita
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.source.peerreviewno
dc.source.beginpage339
dc.source.endpage350
dc.source.journalIBM Journal of Research and Development
dc.source.issue3
dc.source.volume43
imec.availabilityPublished - imec


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