Show simple item record

Advanced wet and dry cleaning coming together for next generation

dc.contributor.authorHeyns, Marc
dc.contributor.authorMertens, Paul
dc.contributor.authorRuzyllo, Jerzy
dc.contributor.authorLeeman, Marc
dc.date.accessioned2021-10-06T11:20:56Z
dc.date.available2021-10-06T11:20:56Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3510
dc.sourceIIOimport
dc.titleAdvanced wet and dry cleaning coming together for next generation
dc.typeJournal article
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorMertens, Paul
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage37
dc.source.endpage47
dc.source.journalSolid State Technology
dc.source.issue3
dc.source.volume42
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
3471.pdf
Size:
7.257Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record