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Critical dimension metrology using Raman spectroscopy

dc.contributor.authorGawlik, Andrzej
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorNuytten, Thomas
dc.contributor.authorCharley, Anne-Laure
dc.contributor.authorTeugels, Lieve
dc.contributor.authorMisiewicz, Jan
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-28T21:52:53Z
dc.date.available2021-10-28T21:52:53Z
dc.date.issued2020
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35160
dc.sourceIIOimport
dc.titleCritical dimension metrology using Raman spectroscopy
dc.typeJournal article
dc.contributor.imecauthorGawlik, Andrzej
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorNuytten, Thomas
dc.contributor.imecauthorCharley, Anne-Laure
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecGawlik, Andrzej::0000-0002-6540-2735
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecNuytten, Thomas::0000-0002-5921-6928
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.source.peerreviewyes
dc.source.beginpage43102
dc.source.journalApplied Physics Letters
dc.source.issue4
dc.source.volume117
dc.identifier.urlhttps://doi.org/10.1063/5.0013506
imec.availabilityPublished - imec


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