Effect of extreme surface roughness on the electrical characteristics of ultra-thin gate oxides
dc.contributor.author | Houssa, Michel | |
dc.contributor.author | Nigam, Tanya | |
dc.contributor.author | Mertens, Paul | |
dc.contributor.author | Heyns, Marc | |
dc.date.accessioned | 2021-10-06T11:23:19Z | |
dc.date.available | 2021-10-06T11:23:19Z | |
dc.date.issued | 1999 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3522 | |
dc.source | IIOimport | |
dc.title | Effect of extreme surface roughness on the electrical characteristics of ultra-thin gate oxides | |
dc.type | Journal article | |
dc.contributor.imecauthor | Houssa, Michel | |
dc.contributor.imecauthor | Mertens, Paul | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.orcidimec | Houssa, Michel::0000-0003-1844-3515 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 159 | |
dc.source.endpage | 168 | |
dc.source.journal | Solid-State Electronics | |
dc.source.issue | 1 | |
dc.source.volume | 43 | |
imec.availability | Published - open access |