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Enhancing the defect contrast in ECCI through angular filtering of BSEs

dc.contributor.authorHan, Han
dc.contributor.authorHantschel, Thomas
dc.contributor.authorSchulze, Andreas
dc.contributor.authorStrakos, Libor
dc.contributor.authorVystavel, Tomas
dc.contributor.authorLoo, Roger
dc.contributor.authorKunert, Bernardette
dc.contributor.authorLanger, Robert
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorCaymax, Matty
dc.date.accessioned2021-10-28T22:21:00Z
dc.date.available2021-10-28T22:21:00Z
dc.date.issued2020
dc.identifier.issn0304-3991
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35238
dc.sourceIIOimport
dc.titleEnhancing the defect contrast in ECCI through angular filtering of BSEs
dc.typeJournal article
dc.contributor.imecauthorHan, Han
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorKunert, Bernardette
dc.contributor.imecauthorLanger, Robert
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecHan, Han::0000-0003-2169-8332
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecKunert, Bernardette::0000-0002-8986-4109
dc.contributor.orcidimecLanger, Robert::0000-0002-1132-3468
dc.source.peerreviewyes
dc.source.beginpage112922
dc.source.journalUltramicroscopy
dc.source.volume210
dc.identifier.urlhttps://doi.org/10.1016/j.ultramic.2019.112922
imec.availabilityPublished - imec


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