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Plasma enhanced atomic layer deposition of (nitrogen doped) Ti phosphate for improved energy storage in Li-ion batteries

dc.contributor.authorHenderick, Lowie
dc.contributor.authorHamed, Hamid
dc.contributor.authorMattelaer, Felix
dc.contributor.authorMinjauw, Matthias
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorDendooven, Jolien
dc.contributor.authorSafari, Momo
dc.contributor.authorVereecken, Philippe
dc.contributor.authorDetavernier, Christophe
dc.date.accessioned2021-10-28T22:29:10Z
dc.date.available2021-10-28T22:29:10Z
dc.date.issued2020
dc.identifier.issn1944-8244
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35261
dc.sourceIIOimport
dc.titlePlasma enhanced atomic layer deposition of (nitrogen doped) Ti phosphate for improved energy storage in Li-ion batteries
dc.typeJournal article
dc.contributor.imecauthorHamed, Hamid
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorSafari, Momo
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage25949
dc.source.endpage25960
dc.source.journalACS Applied Materials & Interfaces
dc.source.volume12
dc.identifier.urlhttps://doi.org/10.1021/acsami.0c05585
imec.availabilityPublished - open access


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