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Silicon photonics co-integrated with silicon nitride for optical phased arrays

dc.contributor.authorMarinins, Aleksandrs
dc.contributor.authorDwivedi, Sarvagya Paavan
dc.contributor.authorKjellman, Jon
dc.contributor.authorKerman, Sarp
dc.contributor.authorDavid, Tangla
dc.contributor.authorFigeys, Bruno
dc.contributor.authorJansen, Roelof
dc.contributor.authorSabuncuoglu Tezcan, Deniz
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorSoussan, Philippe
dc.date.accessioned2021-10-29T00:32:26Z
dc.date.available2021-10-29T00:32:26Z
dc.date.issued2020
dc.identifier.issn0021-4922
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35548
dc.sourceIIOimport
dc.titleSilicon photonics co-integrated with silicon nitride for optical phased arrays
dc.typeJournal article
dc.contributor.imecauthorMarinins, Aleksandrs
dc.contributor.imecauthorDwivedi, Sarvagya Paavan
dc.contributor.imecauthorKjellman, Jon
dc.contributor.imecauthorFigeys, Bruno
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorSabuncuoglu Tezcan, Deniz
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorSoussan, Philippe
dc.contributor.orcidimecDwivedi, Sarvagya Paavan::0000-0003-1184-3225
dc.contributor.orcidimecFigeys, Bruno::0000-0002-0108-3907
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecSabuncuoglu Tezcan, Deniz::0000-0002-9237-7862
dc.contributor.orcidimecSoussan, Philippe::0000-0002-1347-6978
dc.identifier.doi10.7567/1347-4065/ab5b6d
dc.source.peerreviewyes
dc.source.beginpageSGGE02
dc.source.journalJapanese Journal of Applied Physics
dc.source.volume108
imec.availabilityPublished - imec


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