Characterization of Plasma-Etch-Cleaning
| dc.contributor.author | Kim, Young-Chang | |
| dc.date.accessioned | 2021-10-06T11:29:47Z | |
| dc.date.available | 2021-10-06T11:29:47Z | |
| dc.date.issued | 1999-05 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3554 | |
| dc.source | IIOimport | |
| dc.title | Characterization of Plasma-Etch-Cleaning | |
| dc.type | PHD thesis | |
| dc.source.peerreview | no | |
| imec.availability | Published - imec | |
| imec.internalnotes | Thiesis Advisors : Prof. Dr. Ir. G. Declerck and Prof. Dr. Ir. R. De Keersmaecker |
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