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Defect profiling in FEFET Si:HfO2 layers

dc.contributor.authorO'Sullivan, Barry
dc.contributor.authorPutcha, Vamsi
dc.contributor.authorIzmailov, Roman
dc.contributor.authorAfanas'ev, Valeri V.
dc.contributor.authorSimoen, Eddy
dc.contributor.authorJung, Taehwan
dc.contributor.authorHigashi, Yusuke
dc.contributor.authorDegraeve, Robin
dc.contributor.authorTruijen, Brecht
dc.contributor.authorKaczer, Ben
dc.contributor.authorRonchi, Nicolo
dc.contributor.authorMcMitchell, Sean
dc.contributor.authorBanerjee, Kaustuv
dc.contributor.authorClima, Sergiu
dc.contributor.authorBreuil, Laurent
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorLinten, Dimitri
dc.contributor.authorVan Houdt, Jan
dc.date.accessioned2021-10-29T01:41:04Z
dc.date.available2021-10-29T01:41:04Z
dc.date.issued2020
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35686
dc.sourceIIOimport
dc.titleDefect profiling in FEFET Si:HfO2 layers
dc.typeJournal article
dc.contributor.imecauthorO'Sullivan, Barry
dc.contributor.imecauthorPutcha, Vamsi
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorJung, Taehwan
dc.contributor.imecauthorHigashi, Yusuke
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorTruijen, Brecht
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorRonchi, Nicolo
dc.contributor.imecauthorMcMitchell, Sean
dc.contributor.imecauthorBanerjee, Kaustuv
dc.contributor.imecauthorClima, Sergiu
dc.contributor.imecauthorBreuil, Laurent
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecO'Sullivan, Barry::0000-0002-9036-8241
dc.contributor.orcidimecPutcha, Vamsi::0000-0003-1907-5486
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecTruijen, Brecht::0000-0002-2288-1414
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecRonchi, Nicolo::0000-0002-7961-4077
dc.contributor.orcidimecBanerjee, Kaustuv::0000-0001-8003-6211
dc.contributor.orcidimecClima, Sergiu::0000-0002-4044-9975
dc.contributor.orcidimecBreuil, Laurent::0000-0003-2869-1651
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.contributor.orcidimecVan Houdt, Jan::1234-1234-1234-1235
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage203504
dc.source.journalApplied Physics Letters
dc.source.issue20
dc.source.volume117
dc.identifier.urlhttps://doi.org/10.1063/5.0029072
imec.availabilityPublished - open access


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