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Understanding the effect of confinement in scanning spreading resistance microscopy measurements

dc.contributor.authorPandey, Komal
dc.contributor.authorParedis, Kristof
dc.contributor.authorRobson, Alexander
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-29T01:47:18Z
dc.date.available2021-10-29T01:47:18Z
dc.date.issued2020
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35698
dc.sourceIIOimport
dc.titleUnderstanding the effect of confinement in scanning spreading resistance microscopy measurements
dc.typeJournal article
dc.contributor.imecauthorPandey, Komal
dc.contributor.imecauthorParedis, Kristof
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecParedis, Kristof::0000-0002-5163-4164
dc.identifier.doi10.1063/5.0011703
dc.source.peerreviewyes
dc.source.beginpage34303
dc.source.journalJournal of Applied Physics
dc.source.issue3
dc.source.volume128
imec.availabilityPublished - open access


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