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A chemical role of refractory metal caps in Co silicidation: Evidence of SiO2 reduction by Ti cap

dc.contributor.authorKondoh, Eiichi
dc.contributor.authorConard, Thierry
dc.contributor.authorBrijs, Bert
dc.contributor.authorJin, S.
dc.contributor.authorBender, Hugo
dc.contributor.authorde Potter de ten Broeck, Muriel
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-06T11:33:05Z
dc.date.available2021-10-06T11:33:05Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3570
dc.sourceIIOimport
dc.titleA chemical role of refractory metal caps in Co silicidation: Evidence of SiO2 reduction by Ti cap
dc.typeJournal article
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorde Potter de ten Broeck, Muriel
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage4402
dc.source.endpage4408
dc.source.journalJ. Materials Research
dc.source.issue11
dc.source.volume14
imec.availabilityPublished - open access


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