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Measurements of trace gaseous ambient impurities on an atmospheric pressure rapid thermal processor

dc.contributor.authorKondoh, Eiichi
dc.contributor.authorVereecke, Guy
dc.contributor.authorHeyns, Marc
dc.contributor.authorMaex, Karen
dc.contributor.authorGutt, T.
dc.date.accessioned2021-10-06T11:33:18Z
dc.date.available2021-10-06T11:33:18Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3571
dc.sourceIIOimport
dc.titleMeasurements of trace gaseous ambient impurities on an atmospheric pressure rapid thermal processor
dc.typeJournal article
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.source.peerreviewno
dc.source.beginpage650
dc.source.endpage656
dc.source.journalJ. Vacuum Science and Technology A
dc.source.issue2
dc.source.volume17
imec.availabilityPublished - imec


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