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Nanodiamond seeding on plasma-treated tantalum thin films and the role of surface contamination

dc.contributor.authorPobedinskas, Paulius
dc.contributor.authorDegutis, Giedrius
dc.contributor.authorDexters, W.
dc.contributor.authorD'Haen, Jan
dc.contributor.authorVan Bael, Marlies
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-29T02:14:26Z
dc.date.available2021-10-29T02:14:26Z
dc.date.issued2020
dc.identifier.issn0169-4332
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35747
dc.sourceIIOimport
dc.titleNanodiamond seeding on plasma-treated tantalum thin films and the role of surface contamination
dc.typeJournal article
dc.contributor.imecauthorPobedinskas, Paulius
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecPobedinskas, Paulius::0000-0001-8136-5172
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.date.embargo9999-12-31
dc.identifier.doi10.1016/j.apsusc.2020.148016
dc.source.peerreviewyes
dc.source.beginpage148016
dc.source.journalApplied Surface Science
dc.source.volume538
imec.availabilityPublished - open access


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