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Low temperature selective growth of heavily boron-doped germanium source /drain layers for advanced pMOS devices

dc.contributor.authorPorret, Clément
dc.contributor.authorVohra, Anurag
dc.contributor.authorNakazaki, Nobuya
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorDouhard, Bastien
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorRosseel, Erik
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorLanger, Robert
dc.contributor.authorLoo, Roger
dc.date.accessioned2021-10-29T02:20:08Z
dc.date.available2021-10-29T02:20:08Z
dc.date.issued2020
dc.identifier.issn1862-6300
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35757
dc.sourceIIOimport
dc.titleLow temperature selective growth of heavily boron-doped germanium source /drain layers for advanced pMOS devices
dc.typeJournal article
dc.contributor.imecauthorPorret, Clément
dc.contributor.imecauthorVohra, Anurag
dc.contributor.imecauthorNakazaki, Nobuya
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorLanger, Robert
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecPorret, Clément::0000-0002-4561-348X
dc.contributor.orcidimecVohra, Anurag::0000-0002-2831-0719
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecLanger, Robert::0000-0002-1132-3468
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewyes
dc.source.beginpage1900628
dc.source.journalPhysica Status Solidi A
dc.source.issue3
dc.source.volume217
dc.identifier.urlhttps://doi.org/10.1002/pssa.201900628
imec.availabilityPublished - imec


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