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MEMS-enabled silicon photonic integrated devices and circuits

dc.contributor.authorQuack, Niels
dc.contributor.authorSattari, Hamed
dc.contributor.authorTakabayashi, Alain Yuji
dc.contributor.authorZhang, Yu
dc.contributor.authorVerheyen, Peter
dc.contributor.authorBogaerts, Wim
dc.contributor.authorEdinger, Pierre
dc.contributor.authorErrando-Herranz, Carlos
dc.contributor.authorGylfason, Kristinn B.
dc.date.accessioned2021-10-29T02:31:15Z
dc.date.available2021-10-29T02:31:15Z
dc.date.issued2020-02
dc.identifier.issn0018-9197
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35776
dc.sourceIIOimport
dc.titleMEMS-enabled silicon photonic integrated devices and circuits
dc.typeJournal article
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage8400210
dc.source.journalIEEE Journal of Quantum Electronics
dc.source.issue1
dc.source.volume56
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8864062
imec.availabilityPublished - open access
imec.internalnotes


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