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Effect of molecular weight on the EUV-printability of main chain scission type polymers

dc.contributor.authorRathore, Ashish
dc.contributor.authorPollentier, Ivan
dc.contributor.authorSingh, Harpreet
dc.contributor.authorFallica, Roberto
dc.contributor.authorDe Simone, Danilo
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-29T02:47:56Z
dc.date.available2021-10-29T02:47:56Z
dc.date.issued2020
dc.identifier.issn2050-7526
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35807
dc.sourceIIOimport
dc.titleEffect of molecular weight on the EUV-printability of main chain scission type polymers
dc.typeJournal article
dc.contributor.imecauthorRathore, Ashish
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.imecauthorFallica, Roberto
dc.contributor.imecauthorDe Simone, Danilo
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.contributor.orcidimecFallica, Roberto::0000-0003-4523-9624
dc.contributor.orcidimecDe Simone, Danilo::0000-0003-3927-5207
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewyes
dc.source.beginpage5958
dc.source.endpage5966
dc.source.journalJournal of Materials Chemistry C
dc.source.issue17
dc.source.volume8
dc.identifier.urlhttps://doi.org/10.1039/C9TC06482F
imec.availabilityPublished - imec


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