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Surface-dependent adsorption and diffusion processes in area-selective deposition of ruthenium

dc.contributor.authorSoethoudt, Job
dc.date.accessioned2021-10-29T04:31:01Z
dc.date.available2021-10-29T04:31:01Z
dc.date.issued2020-03
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35985
dc.sourceIIOimport
dc.titleSurface-dependent adsorption and diffusion processes in area-selective deposition of ruthenium
dc.typePHD thesis
dc.contributor.imecauthorSoethoudt, Job
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorDelabie, Annelies
imec.availabilityPublished - open access


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