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Self-aligned CoSi2 for 0.18mm and below

dc.contributor.authorMaex, Karen
dc.contributor.authorLauwers, A.
dc.contributor.authorBesser, Paul
dc.contributor.authorKondoh, Eiichi
dc.contributor.authorde Potter de ten Broeck, Muriel
dc.contributor.authorSteegen, An
dc.date.accessioned2021-10-14T11:29:55Z
dc.date.available2021-10-14T11:29:55Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3645
dc.sourceIIOimport
dc.titleSelf-aligned CoSi2 for 0.18mm and below
dc.typeJournal article
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorBesser, Paul
dc.contributor.imecauthorde Potter de ten Broeck, Muriel
dc.source.peerreviewno
dc.source.beginpage1545
dc.source.endpage1550
dc.source.journalIEEE Trans. Electron Devices
dc.source.issue7
dc.source.volume46
imec.availabilityPublished - imec


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