Self-aligned CoSi2 for 0.18mm and below

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Authors

Maex, Karen; Lauwers, A.; Besser, Paul; Kondoh, Eiichi; de Potter de ten Broeck, Muriel; Steegen, An

Issue

7

Journal

IEEE Trans. Electron Devices

Volume

46

Title

Self-aligned CoSi2 for 0.18mm and below

Publication type

Journal article

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