Publication:
Self-aligned CoSi2 for 0.18mm and below
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1987 since deposited on 2021-10-14
3last month
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Acq. date: 2026-01-08
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Metrics
Views
1987 since deposited on 2021-10-14
3last month
3last week
Acq. date: 2026-01-08
Citations