Publication:
Self-aligned CoSi2 for 0.18mm and below
Date
| dc.contributor.author | Maex, Karen | |
| dc.contributor.author | Lauwers, A. | |
| dc.contributor.author | Besser, Paul | |
| dc.contributor.author | Kondoh, Eiichi | |
| dc.contributor.author | de Potter de ten Broeck, Muriel | |
| dc.contributor.author | Steegen, An | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.contributor.imecauthor | Besser, Paul | |
| dc.contributor.imecauthor | de Potter de ten Broeck, Muriel | |
| dc.date.accessioned | 2021-10-14T11:29:55Z | |
| dc.date.available | 2021-10-14T11:29:55Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3645 | |
| dc.source.beginpage | 1545 | |
| dc.source.endpage | 1550 | |
| dc.source.issue | 7 | |
| dc.source.journal | IEEE Trans. Electron Devices | |
| dc.source.volume | 46 | |
| dc.title | Self-aligned CoSi2 for 0.18mm and below | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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