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Diamond tips and cantilevers for the characterization of semiconductor devices

dc.contributor.authorMalavé, A.
dc.contributor.authorOesterschulze, E.
dc.contributor.authorKulisch, W.
dc.contributor.authorTrenkler, Thomas
dc.contributor.authorHantschel, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-14T11:29:59Z
dc.date.available2021-10-14T11:29:59Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3649
dc.sourceIIOimport
dc.titleDiamond tips and cantilevers for the characterization of semiconductor devices
dc.typeJournal article
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage283
dc.source.endpage287
dc.source.journalDiamond and Related Materials
dc.source.issue2_5
dc.source.volume8
imec.availabilityPublished - open access


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