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Extremely small mulitmode interference couplers and ultrashort bends on InP by deep etching

dc.contributor.authorSpiekman, L. H.
dc.contributor.authorOei, Y. S.
dc.contributor.authorMetaal, E. G.
dc.contributor.authorGroen, F. H.
dc.contributor.authorMoerman, Ingrid
dc.contributor.authorSmit, M. K.
dc.date.accessioned2021-09-29T12:48:16Z
dc.date.available2021-09-29T12:48:16Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/365
dc.sourceIIOimport
dc.titleExtremely small mulitmode interference couplers and ultrashort bends on InP by deep etching
dc.typeJournal article
dc.contributor.imecauthorMoerman, Ingrid
dc.source.peerreviewno
dc.source.beginpage1008
dc.source.endpage1010
dc.source.journalIEEE Photonics Technology Letters
dc.source.issue8
dc.source.volume6
imec.availabilityPublished - imec


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