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Growth Kinetics, Electrical Characterization and Reliability Study of sub-5 nm Gate Dielectrics

dc.contributor.authorNigam, Tanya
dc.date.accessioned2021-10-14T11:31:44Z
dc.date.available2021-10-14T11:31:44Z
dc.date.issued1999-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3702
dc.sourceIIOimport
dc.titleGrowth Kinetics, Electrical Characterization and Reliability Study of sub-5 nm Gate Dielectrics
dc.typePHD thesis
dc.source.peerreviewno
imec.availabilityPublished - imec


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