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Linearized radially polarized light for improved precision in strain measurements using micro-Raman spectroscopy
dc.contributor.author | Prabhakara, V | |
dc.contributor.author | Nuytten, T. | |
dc.contributor.author | Bender, H. | |
dc.contributor.author | Vandervorst, W. | |
dc.contributor.author | Bals, S. | |
dc.contributor.author | Verbeeck, J. | |
dc.date.accessioned | 2021-11-02T15:55:03Z | |
dc.date.available | 2021-11-02T15:55:03Z | |
dc.date.issued | 2021-OCT 11 | |
dc.identifier.issn | 1094-4087 | |
dc.identifier.other | WOS:000708940500144 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/37430 | |
dc.source | WOS | |
dc.title | Linearized radially polarized light for improved precision in strain measurements using micro-Raman spectroscopy | |
dc.type | Journal article | |
dc.contributor.imecauthor | Prabhakara, V | |
dc.contributor.imecauthor | Nuytten, T. | |
dc.contributor.imecauthor | Bender, H. | |
dc.contributor.imecauthor | Vandervorst, W. | |
dc.identifier.doi | 10.1364/OE.434726 | |
dc.source.numberofpages | 21 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 34531 | |
dc.source.endpage | 34551 | |
dc.source.journal | OPTICS EXPRESS | |
dc.source.issue | 21 | |
dc.source.volume | 29 | |
imec.availability | Under review |
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