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Chemical and electrical characterization of the interaction of BCl 3/Cl2 etching and CF4/H2O stripping plasmas with aluminum surfaces

dc.contributor.authorProost, Joris
dc.contributor.authorLi, H.
dc.contributor.authorConard, Thierry
dc.contributor.authorBoullart, Werner
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T11:34:55Z
dc.date.available2021-10-14T11:34:55Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3766
dc.sourceIIOimport
dc.titleChemical and electrical characterization of the interaction of BCl 3/Cl2 etching and CF4/H2O stripping plasmas with aluminum surfaces
dc.typeJournal article
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.source.peerreviewno
dc.source.beginpage4230
dc.source.endpage4235
dc.source.journalJ. Electrochem. Soc.
dc.source.issue11
imec.availabilityPublished - imec


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