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Surface characterization of a low dielectric constant polymer-SiLK polymer, and investigation of its interface with Cu

dc.contributor.authorRajagopal, A.
dc.contributor.authorGrégoire, C.
dc.contributor.authorLemaire, J. J.
dc.contributor.authorPireaux, J. J.
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorVanhaelemeersch, Serge
dc.contributor.authorMaex, Karen
dc.contributor.authorWaeterloos, Joost
dc.date.accessioned2021-10-14T11:35:03Z
dc.date.available2021-10-14T11:35:03Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3768
dc.sourceIIOimport
dc.titleSurface characterization of a low dielectric constant polymer-SiLK polymer, and investigation of its interface with Cu
dc.typeJournal article
dc.contributor.imecauthorVanhaelemeersch, Serge
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecVanhaelemeersch, Serge::0000-0003-2102-7395
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage2336
dc.source.endpage2340
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue5
dc.source.volume17
imec.availabilityPublished - open access


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