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First Monolithic Integration of 3D Complementary FET (CFET) on 300mm Wafers

dc.contributor.authorSubramanian, Sujith
dc.contributor.authorHosseini, Maryam
dc.contributor.authorChiarella, Thomas
dc.contributor.authorSarkar, Satadru
dc.contributor.authorSchuddinck, Pieter
dc.contributor.authorChan, BT
dc.contributor.authorRadisic, Dunja
dc.contributor.authorMannaert, Geert
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorRosseel, Erik
dc.contributor.authorSebaai, Farid
dc.contributor.authorPeter, Antony
dc.contributor.authorHopf, Toby
dc.contributor.authorMorin, Pierre
dc.contributor.authorWang, Shouhua
dc.contributor.authorDevriendt, Katia
dc.contributor.authorBatuk, Dmitry
dc.contributor.authorMartinez Alanis, Gerardo Tadeo
dc.contributor.authorVeloso, Anabela
dc.contributor.authorDentoni Litta, Eugenio
dc.contributor.authorBaudot, Sylvain
dc.contributor.authorSiew, Yong Kong
dc.contributor.authorZhou, X.
dc.contributor.authorBriggs, Basoene
dc.contributor.authorCapogreco, Elena
dc.contributor.authorHung, Joey
dc.contributor.authorKoret, R.
dc.contributor.authorSpessot, Alessio
dc.contributor.authorRyckaert, Julien
dc.contributor.authorDemuynck, Steven
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorBoemmels, Juergen
dc.date.accessioned2021-12-16T14:41:24Z
dc.date.available2021-11-02T15:59:10Z
dc.date.available2021-12-16T14:41:24Z
dc.date.issued2020
dc.identifier.issn0743-1562
dc.identifier.otherWOS:000668063000059
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37747.2
dc.sourceWOS
dc.titleFirst Monolithic Integration of 3D Complementary FET (CFET) on 300mm Wafers
dc.typeProceedings paper
dc.contributor.imecauthorSubramanian, S.
dc.contributor.imecauthorHosseini, M.
dc.contributor.imecauthorChiarella, T.
dc.contributor.imecauthorSarkar, S.
dc.contributor.imecauthorSchuddinck, P.
dc.contributor.imecauthorChan, B. T.
dc.contributor.imecauthorRadisic, D.
dc.contributor.imecauthorMannaert, G.
dc.contributor.imecauthorHikavyy, A.
dc.contributor.imecauthorRosseel, E.
dc.contributor.imecauthorSebaai, F.
dc.contributor.imecauthorPeter, A.
dc.contributor.imecauthorHopf, T.
dc.contributor.imecauthorMorin, P.
dc.contributor.imecauthorWang, S.
dc.contributor.imecauthorDevriendt, K.
dc.contributor.imecauthorBatuk, D.
dc.contributor.imecauthorMartinez, G. T.
dc.contributor.imecauthorVeloso, A.
dc.contributor.imecauthorLitta, E. Dentoni
dc.contributor.imecauthorBaudot, S.
dc.contributor.imecauthorSiew, Y. K.
dc.contributor.imecauthorZhou, X.
dc.contributor.imecauthorBriggs, B.
dc.contributor.imecauthorCapogreco, E.
dc.contributor.imecauthorHung, J.
dc.contributor.imecauthorSpessot, A.
dc.contributor.imecauthorRyckaert, J.
dc.contributor.imecauthorDemuynck, S.
dc.contributor.imecauthorHoriguchi, N.
dc.contributor.imecauthorBoemmels, J.
dc.contributor.imecauthorSubramanian, Sujith
dc.contributor.imecauthorHosseini, Maryam
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorSarkar, Satadru
dc.contributor.imecauthorSchuddinck, Pieter
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorRadisic, Dunja
dc.contributor.imecauthorMannaert, Geert
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorPeter, Antony
dc.contributor.imecauthorHopf, Toby
dc.contributor.imecauthorMorin, Pierre
dc.contributor.imecauthorWang, Shouhua
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.imecauthorBatuk, Dmitry
dc.contributor.imecauthorMartinez Alanis, Gerardo Tadeo
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorDentoni Litta, Eugenio
dc.contributor.imecauthorBaudot, Sylvain
dc.contributor.imecauthorSiew, Yong Kong
dc.contributor.imecauthorBriggs, Basoene
dc.contributor.imecauthorCapogreco, Elena
dc.contributor.imecauthorHung, Joey
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.orcidimecSubramanian, Sujith::0000-0001-8938-9750
dc.contributor.orcidimecHosseini, Maryam::0000-0002-0210-4095
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecMorin, Pierre::0000-0002-4637-496X
dc.contributor.orcidimecWang, Shouhua::0000-0002-9105-8552
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.contributor.orcidimecBatuk, Dmitry::0000-0002-6384-6690
dc.contributor.orcidimecMartinez Alanis, Gerardo Tadeo::0000-0001-5036-0491
dc.contributor.orcidimecDentoni Litta, Eugenio::0000-0003-0333-376X
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.identifier.eisbn978-1-7281-6460-1
dc.source.numberofpages2
dc.source.peerreviewyes
dc.source.conferenceIEEE Symposium on VLSI Technology and Circuits
dc.source.conferencedateJUN 15-19, 2020
dc.source.conferencelocationHonolulu, HI, USA
dc.source.journalna
imec.availabilityPublished - imec


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220.500.12860/37747.2*2021-12-16T14:29:04Zvalidation by library/open access desk
120.500.12860/377472021-11-02T15:59:10Z

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