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First Monolithic Integration of 3D Complementary FET (CFET) on 300mm Wafers

dc.contributor.authorSubramanian, S.
dc.contributor.authorHosseini, M.
dc.contributor.authorChiarella, T.
dc.contributor.authorSarkar, S.
dc.contributor.authorSchuddinck, P.
dc.contributor.authorChan, B. T.
dc.contributor.authorRadisic, D.
dc.contributor.authorMannaert, G.
dc.contributor.authorHikavyy, A.
dc.contributor.authorRosseel, E.
dc.contributor.authorSebaai, F.
dc.contributor.authorPeter, A.
dc.contributor.authorHopf, T.
dc.contributor.authorMorin, P.
dc.contributor.authorWang, S.
dc.contributor.authorDevriendt, K.
dc.contributor.authorBatuk, D.
dc.contributor.authorMartinez, G. T.
dc.contributor.authorVeloso, A.
dc.contributor.authorLitta, E. Dentoni
dc.contributor.authorBaudot, S.
dc.contributor.authorSiew, Y. K.
dc.contributor.authorZhou, X.
dc.contributor.authorBriggs, B.
dc.contributor.authorCapogreco, E.
dc.contributor.authorHung, J.
dc.contributor.authorKoret, R.
dc.contributor.authorSpessot, A.
dc.contributor.authorRyckaert, J.
dc.contributor.authorDemuynck, S.
dc.contributor.authorHoriguchi, N.
dc.contributor.authorBoemmels, J.
dc.date.accessioned2021-11-02T15:59:10Z
dc.date.available2021-11-02T15:59:10Z
dc.date.issued2020
dc.identifier.issn0743-1562
dc.identifier.otherWOS:000668063000059
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37747
dc.sourceWOS
dc.titleFirst Monolithic Integration of 3D Complementary FET (CFET) on 300mm Wafers
dc.typeProceedings paper
dc.contributor.imecauthorSubramanian, S.
dc.contributor.imecauthorHosseini, M.
dc.contributor.imecauthorChiarella, T.
dc.contributor.imecauthorSarkar, S.
dc.contributor.imecauthorSchuddinck, P.
dc.contributor.imecauthorChan, B. T.
dc.contributor.imecauthorRadisic, D.
dc.contributor.imecauthorMannaert, G.
dc.contributor.imecauthorHikavyy, A.
dc.contributor.imecauthorRosseel, E.
dc.contributor.imecauthorSebaai, F.
dc.contributor.imecauthorPeter, A.
dc.contributor.imecauthorHopf, T.
dc.contributor.imecauthorMorin, P.
dc.contributor.imecauthorWang, S.
dc.contributor.imecauthorDevriendt, K.
dc.contributor.imecauthorBatuk, D.
dc.contributor.imecauthorMartinez, G. T.
dc.contributor.imecauthorVeloso, A.
dc.contributor.imecauthorLitta, E. Dentoni
dc.contributor.imecauthorBaudot, S.
dc.contributor.imecauthorSiew, Y. K.
dc.contributor.imecauthorZhou, X.
dc.contributor.imecauthorBriggs, B.
dc.contributor.imecauthorCapogreco, E.
dc.contributor.imecauthorHung, J.
dc.contributor.imecauthorSpessot, A.
dc.contributor.imecauthorRyckaert, J.
dc.contributor.imecauthorDemuynck, S.
dc.contributor.imecauthorHoriguchi, N.
dc.contributor.imecauthorBoemmels, J.
dc.identifier.eisbn978-1-7281-6460-1
dc.source.numberofpages2
dc.source.peerreviewyes
dc.source.conferenceIEEE Symposium on VLSI Technology and Circuits
dc.source.conferencedateJUN 15-19, 2020
imec.availabilityUnder review


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220.500.12860/37747.22021-12-16T14:29:04Zvalidation by library/open access desk
120.500.12860/37747*2021-11-02T15:59:10Z

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