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Probing the evolution of electrically active defects in doped ferroelectric HfO2 during wake-up and fatigue

dc.contributor.authorCelano, Umberto
dc.contributor.authorChen, Yi-Hsuan
dc.contributor.authorMinj, Albert
dc.contributor.authorBanerjee, Kaustuv
dc.contributor.authorRonchi, Nicolo
dc.contributor.authorMcMitchell, Sean
dc.contributor.authorVan Marcke, Patricia
dc.contributor.authorFavia, Paola
dc.contributor.authorWu, T. L.
dc.contributor.authorKaczer, Ben
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorVan Houdt, Jan
dc.contributor.authorvan der Heide, Paul
dc.date.accessioned2022-01-20T10:04:45Z
dc.date.available2021-11-02T15:59:26Z
dc.date.available2022-01-20T10:04:45Z
dc.date.issued2020
dc.identifier.issn0743-1562
dc.identifier.otherWOS:000668063000082
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37750.2
dc.sourceWOS
dc.titleProbing the evolution of electrically active defects in doped ferroelectric HfO2 during wake-up and fatigue
dc.typeProceedings paper
dc.contributor.imecauthorCelano, U.
dc.contributor.imecauthorChen, Y. H.
dc.contributor.imecauthorMinj, A.
dc.contributor.imecauthorBanerjee, K.
dc.contributor.imecauthorRonchi, N.
dc.contributor.imecauthorMcMitchell, S.
dc.contributor.imecauthorVan Marcke, P.
dc.contributor.imecauthorFavia, P.
dc.contributor.imecauthorKaczer, B.
dc.contributor.imecauthorVan den Bosch, G.
dc.contributor.imecauthorVan Houdt, J.
dc.contributor.imecauthorvan der Heide, P.
dc.contributor.imecauthorCelano, Umberto
dc.contributor.imecauthorChen, Yi-Hsuan
dc.contributor.imecauthorMinj, Albert
dc.contributor.imecauthorBanerjee, Kaustuv
dc.contributor.imecauthorRonchi, Nicolo
dc.contributor.imecauthorMcMitchell, Sean
dc.contributor.imecauthorVan Marcke, Patricia
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.imecauthorvan der Heide, Paul
dc.contributor.orcidimecCelano, U.::0000-0002-2856-3847
dc.contributor.orcidimecCelano, Umberto::0000-0002-2856-3847
dc.contributor.orcidimecMinj, Albert::0000-0003-0878-3276
dc.contributor.orcidimecBanerjee, Kaustuv::0000-0001-8003-6211
dc.contributor.orcidimecRonchi, Nicolo::0000-0002-7961-4077
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecVan Houdt, Jan::1234-1234-1234-1235
dc.contributor.orcidimecvan der Heide, Paul::0000-0001-6292-0329
dc.identifier.eisbn978-1-7281-6460-1
dc.source.numberofpages2
dc.source.peerreviewyes
dc.source.conferenceIEEE Symposium on VLSI Technology and Circuits
dc.source.conferencedateJUN 15-19, 2020
dc.source.conferencelocationVirtual
dc.source.journalna
imec.availabilityPublished - imec


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220.500.12860/37750.2*2022-01-20T09:58:29Zvalidation by library/open access desk
120.500.12860/377502021-11-02T15:59:26Z

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